SH-SAWs in layered Piezoelectric Structures Carrying an Array of Microbeams

Abstract

Shear horizontal surface acoustic waves (SH- SAWS) propagation in layered piezoelectric structure carrying an array of microbeams is studied in this paper. Based on the three-dimensional piezoelectricity theory, the coupling wave equations are obtained and solved by analytical method with consideration of both electrically open and short conditions. The beams are modeled using the Euler-Bernoulli theories when they are bending during the piezoelectric structures in shear motion. The effects of the microbeams on the phase velocity are presented and discussed in detail. From the results, we can find the phase velocity decrease with the non-dimensional wave number, while it is increase with the number of the microbeams. The geometric parameters of the cantilever beams, such as Young's modulus, diameter and length have evident effect on the phase velocity, we can find that the phase velocity decrease with length-diameter ratio of the cantilever beams. The method and results presented in the paper could be useful to the analysis and design of surface acoustic wave devices. Keywords- SH-SAW; dispersion; piezoelectric; microbeam;la yered structure