Abstract
This paper provides an overview of nanocomposite organic electron beam (EB) resist polymers from the viewpoint of advanced techniques for biology and medicine. An outstanding issue with organic devices is the difficulty of simultaneously controlling the lateral size and position of structures at submicron or nanometer scales. Nanocomposite EB organic resist of ZEP520a containing [6,6]-phenyl-C61 butyric acid methyl ester (PCBM) is an excellent electrically conductive material for nanometer lateral-scale organic electronic devices. The distribution of PCBM aggregations in the nanocomposite is examined. The results open the door to the simple fabrication of densely integrated sensitive biosensors with electrical nanowires and single-electron transistors for multiplexed and simultaneous diagnoses.
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