Abstract
Uncooled, micromachined pyroelectric infrared detectors based on semiconducting YBaCuO were fabricated and characterised at room temperature. The detectors were fabricated with CMOS compatible techniques that demonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 µC/cm2 K and detectivities over 108 cm·Hz1/2/W were measured.
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