Self-Terminated CVD-Functionalization of Organic Self-Assembled Monolayers (SAMs) with Trimethylamine Alane (TMAA)

Abstract

Chemoselective deposition of alane and patterned deposition of alane and aluminum oxide on ultrathin organic selfassembled monolayers (SAMs) were investigated. Information about elementary steps of the interaction of trimethyl amine alane (TMAA) with appropriately functionalized HO- and HOOC-terminated SAMs under UHV conditions is presented. The self-terminated growth of an alane bilayer on HO-terminated SAMs was established on the basis of quantitative X-ray photoelectron spectroscopy (XPS) analysis. A patterned deposition of 2 nm of aluminum oxide on patterned SAMs obtained by microcontact printing is demonstrated.