Abstract
In this letter, a piezoelectric force sensor based on thinned bulk PZT is proposed to monitor cutaneous activities in real time and recognize hand gestures. Bulk inorganic piezoelectric ceramic bonded with a thin metal foil is thinned down by a chemical mechanical polishing process due to its excellent electromechanical factor. More uniform strain distribution can be generated by the metal layer. A flexible plastic substrate is used to achieve good contact with the rough skin surface. The sensitivity of this sensor with ~10 V/N is obviously improved compared with recently reported force sensors based on deposited PZT film. This multifunctional wearable force sensor is very significant for the application of intelligent and portable healthcare monitoring and man–machine interaction.
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