Abstract
Hexagonal boron nitride nanotubes (BNNTs) were synthesized at a low substrate temperature of800 °C on nickel (Ni) coated oxidized Si(111) wafers in a microwave plasma-enhanced chemical vapordeposition system (MPCVD) by decomposition and reaction of gas mixtures consisting ofB2H6–NH3–H2. The 1D BN nanostructures grew preferentially on Ni catalyst islands with a smallthickness only. In situ mass spectroscopic analysis and optical emission spectroscopy wereused to identify the gas reactions responsible for the BNNT formation. The morphologyand structural properties of the deposits were analyzed by SEM, TEM, EDX, SADand Raman spectroscopy. The growth mechanism of the BNNTs was identified.
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