Abstract
Abstract Single-phase ceramics YBa2Cu3O7 produced by the solid-state sintering and used as a target at ion-plasma deposition of films was studied by the X-rays analysis, optical microscopy and microhardness measurement. Following changes occurred in the target during its use: 1. 1-grains having the orientation along the normal to the surface of the target were predominantly etched away by sputtering from the surface of the target; 2. 2 — Y2BaCuO5 compound appeared; 3. 3 — nonuniform distribution of oxygen appeared along the cross-section of the target.
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