Abstract
Single-phase ceramics YBa 2Cu 3O 7 produced by the solid-state sintering and used as a target at ion-plasma deposition of films was studied by the X-rays analysis, optical microscopy and microhardness measurement. Following changes occured in the target during its use: 1 - grains having the < 00 l orientation along to the normal to the surface of the target were predominantly etched away by sputtering from the surface of the target; 2 - Y 2BaCuO 5 compound appeared; 3 - nonuniform distribution of oxygen appeared along the cross-section of the target.
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