Abstract
Abstract : Selective epitaxial growth by metalorganic chemical vapor deposition (MOCVD) is expected to be one of the important technologies to fabricate microstructures of semiconductor devices. Recently, selective epitaxial growth has been applied to fabricate quantum well wire's. In the fabrication of such a fine structure, good selectivity of deposition and excellent controllability of the ultrafine structure of epilayers is required. Many studies concerning to the selective epitaxial growth of III-V compound semiconductors by MOCVD have been reported. We investigated the selective epitaxial growth of GaAs and AlGaAs by atmospheric pressure (AP)-MOCVD using TMGA and TMAI.
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