Abstract

Secondary ion energy spectra from polycrystalline Al, Sc, Ti, V, Cr, Fe, Ni, Cu, Hf, W and Au are presented, exhibiting a complex structure in the region 0–55 eV which is shown to be dependent on surface contamination levels. The design limitations present in existing ion energy and mass analysers, which have prevented the observation of these effects in the past, are defined and methods for their correction are suggested. The changing shape of the ion energy spectrum as a function of the local matrix and surface environment of the departing particle is shown to represent a fundamental difficulty for conventional quantitative SIMS analysis.

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