Abstract
The energy spectra of secondary ions sputtered from 28 metal matrices by O 2 + ions have been studied. The spectra resemble those obtained from the sputtering of pure elements under similar conditions, with the presence of oxygen gas yielding a better correlation than sputtering in residual vacuum. The ionization processes are apparently the same as those which occur in pure samples, but the most probable en'ergies of the distributions are different owing to the difference in surface binding energies or efficiency of momentum transfer. The statistical model of cluster ion formation does not properly describe the details of the spectra. As a direct result of the similarity of the energy spectra of ions from various matrices to the spectra of those ions from pure elements, the bandpass efficiencies of the instrumentation for the various ions are very similar. Therefore, in quantitative analysis, the transmission of the ion optics can be assumed to be the same as when pure samples are bombarded, making the correction of energy discrimination effects feasible. The best analytical condition is obtained with a high partial pressure of oxygen.
Published Version
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