Scalability and process induced variation analysis of polarity controlled silicon nanowire transistor

Abstract

In this paper, we present scalability and process induced variation analysis of polarity gate silicon nanowire field-effect transistor. 3D simulation results show that the PGFET offers significant reduction in short channel effects and variability due to utilization of uniform lightly doped silicon nanowire (SiNW) as compare to highly doped silicon nanowire in junctionless transistors. The performance parameters were evaluated for different device geometries, such as variation in SiNW radius, equivalent oxide thickness, channel length and spacer length. Sensitivity analysis shows that the PGFET exhibits less dependence towards gate length in comparison to other device parameters. It is seen that ON to OFF current ratio variation with silicon nanowire thickness is lower for PGFET as compared to JLFET. The threshold voltage roll-off and sensitivity towards intrinsic delay in PGFET is much lower than its counterpart device.