Abstract
Drilling of micro through-holes in defined geometry, i.e. entrance diameter and taper, is gaining in importance in different fields of application and production. To exploit the advantages of laser technology for micro machining, versatile trepanning systems based on rotating optics have been designed and implemented. The advanced trepanning systems enable the controlled adjustment of beam displacement and inclination during operation. With a patented measuring device, the angular position of the rotating optics is determined online. The presented compact and lowweight trepanning systems can drill differently tapered through-holes with a diameter in a range of 50 to 1500 μm. Various solid-state laser sources have been used in combination with the presented laser trepanning system for material ablation. The wavelength und pulse width range from 355 to 1550 nm and sub-ps to 100 ns. The novel trepanning systems have been customized for different applications, ranging from basic research quest to industrial production. This presentation outlines the development steps and application results, accenting laser micro drilling of up to 1 mm thick metal and dielectric samples.
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