Abstract
A versatile laser trepanning system has been designed and implemented to enable the adjustment of circular beam displacement and inclination during the rotation of the optics. The presented systems drill differently tapered through-holes with a diameter in the range of 50 to over 1000μm. The novel trepanning systems have been customized for different industrial applications. This paper outlines the development steps and advanced performance, accenting laser micro machining of up to 1mm thick metal and ceramic samples and laser parameters. The results presented in this contribution emphasize differently tapered through holes with an entrance diameter of 90 to 150μm.
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