Abstract
A versatile laser trepanning system has been designed and implemented, enabling rapid circular beam steering and fast adjustment of beam displacement and inclination. The presented trepanning systems drill differently tapered through-holes with a diameter in a range of 50 to 1500 µm. The novel trepanning systems have been customized for different applications, ranging from basic research to industrial production. The development steps, laser parameters and advanced performance are outlined, accenting laser micro machining of up to 1 mm thick metal and ceramic samples.A versatile laser trepanning system has been designed and implemented, enabling rapid circular beam steering and fast adjustment of beam displacement and inclination. The presented trepanning systems drill differently tapered through-holes with a diameter in a range of 50 to 1500 µm. The novel trepanning systems have been customized for different applications, ranging from basic research to industrial production. The development steps, laser parameters and advanced performance are outlined, accenting laser micro machining of up to 1 mm thick metal and ceramic samples.
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