Abstract
A novel method to eliminate nonlinearity error in heterodyne interferometer is studied in the paper. A simple phase compensation system is built and the nonlinearity error is eliminated by rotating the polarizer in front of the optical detector in interferometer according to phase difference signal. The experiments demonstrate that the method is available to eliminate one-order or high-order nonlinearity in heterodyne interferometer. The effects to decrease nonlinearity error depend on high measuring precision of phase difference and high control precision of the rotating polarizer.
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