Abstract
The non-orthogonality and ellipticity of laser source is the main error source of nonlinearity in the heterodyne interferometer. The aim of this study is to use mathematical analysis on the relations between the nonlinear error in heterodyne interferometer with non-orthogonal laser beam and optical subdivisions. The simulations show that the nonlinearity errors from the non-orthogonal laser beam are related with the optical subdivisions, and the nonlinearity of heterodyne interferometer grows up when the subdivision number increases.
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