Removal of dilute SF/sub 6/ in He by a pulsed corona reactor

Abstract

Summary form only given. Sulphur hexafluoride (SF/sub 6/) is useful as an insulator of a circuit breaker and as an etcher of semiconductors. Since SF/sub 6/ is one of greenhouse gases, emission of SF/sub 6/ must be limited and reduced. Investigation on removal method of SF/sub 6/ was carried out by using a pulsed corona reactor. An experimental setup is presented. The electrode of the corona reactor is arranged in a co-axial wire-cylinder configuration. The cylindrical tube is used as a cathode electrode and the wire anode electrode is aligned with the center axis of the cylindrical cathode. The concentration of SF/sub 6/ is measured with an absorption spectrometry. The corona reactor and a cell for measurement of SF/sub 6/ absorption in a sample gas are set in a closed gas loop equipped with two buffer chambers. The sample gas flows constantly in closed gas loop. The buffer chambers play a role to fix the concentration of SF/sub 6/ at an inlet of the corona. reactor during one measurement. The sample gas consists of SF/sub 6/ and helium. The pressure of sample gas is 1 atm. The pulsed voltage circuit is a type of capacitor charge transfer.