Abstract
The Mo-Ag-Si solid solution film was prepared using magnetron sputtering to enhance hardness and toughness while reducing friction and wear. Compared with the pure MoSi2 film, the Mo-Ag-Si solid solution film exhibited a 25.69% increase in hardness, a 5.17% increase in the H/E ratio, and a 33.33% boost in the H³/E² ratio. Tribological tests revealed that Ag atoms formed a self-lubricating AgMoxOy phase, reducing the friction coefficient to 0.09 and the wear rate to 3.89 × 10⁻⁷ mm³/N·m over 565m. First-principle calculations indicate that the Mo-Ag-Si solid solution film exhibited better mechanical and tribological properties than the pure MoSi2 film. These findings provide another approach for developing reliable MoSi2 films with high performance.
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