Abstract
We quantitatively compare reflectance-difference spectra (RDS) and second harmonic generation (SHG) spectra of native-oxidized vicinal Si(001)/SiO2 interfaces with off-cut angles α = 0°, 4°, 6°, 8°, and 10° from (001) toward [110] direction. The RD spectrum and the spectrum of the first-order Fourier component of the SHG azimuthal anisotropy reveal similar derivative-like E1 resonance lineshapes, suggesting a common origin in the step-edges and the possibility of formulating a common microscopic model of the RD and SHG responses. (© 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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