Abstract
Ion beam analysis data are presented on both freshly prepared and `aged' porous silicon layers of widely varying (10 - 85%) porosity. Both evaporated Al and PECVD surface capping layers are shown to suppress some of the rapid ion beam induced changes in chemical composition that have been reported during analysis of uncapped layers. Specifically, these capping layers were successful in eliminating carbon and oxygen accumulation within the material but they only slightly reduced hydrogen loss under ion bombardment. Evaporated aluminium surface capping layers were partially successful in suppressing long term ambient oxygen pick-up.
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