Abstract

The effects of low (2.5, 0.2 keV) energy reactive oxygen ion bombardment and argon ion bombardment on poly(ethylene terephthalate) thin film (PET) surface chemical composition were studied. PET films have a high potential as a material for biomedical and electrical industries. The source of ions was an ECR Ion Gun with settable acceleration voltages. PET films were sputtered by ion bombardment for variable process time and the modified films were investigated by in-situ X-ray Photoelectron Spectroscopy (XPS) and ex-situ Fourier transform infrared spectroscopy (FTIR). The significant changes in the chemical composition of surface layers were quantitatively studied by XPS. The ion bombardment scissions the chains in PET film surface layers. Selective sputtering of oxygen atoms from PET surface was observed when argon ion flux used. The 0.2 keV and 2.5 keV argon ion decreased O/C ratio from 0.37 to 0.25, 0.04 respectively. This phenomenon is responsible for the creation of carbon-rich up 96 at.% surface layer and the oxygen in ester bonds is detached first. The oxygen 2.5 keV ion bombardment had similar effect as argon ion bombardment; the ratio O/C was decreased. The ester bond was broken first. But oxygen 0.2 keV ion flux irradiation created an oxygen rich surface; the O/C ratio was in increased from 0.37 to 0.46. The changes in surface conductivity were investigated by shifts in C1s binding energy. Good agreement with atomic concentration of carbon in C–C bonds on the films surface was found. The FTIR analyses identified changes in chemical composition but with no obvious correlation to surface changes. Photons from the ion source irradiating the PET film during ion bombardment probably caused the observed changes in FTIR spectra.

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