Abstract

This letter experimentally demonstrates and and or functionalities with a single MOS transistor. Device architecture and fabrication follow the recent work on fabrication-based feasibility assessment of junctionless vertical-slit field-effect transistor. Slit width variation is used to realize a particular functionality-wider for or function and narrower for and function. The fabricated n-type devices with the and and or functionalities exhibit good electrical performance: low off current (<; 5 pA/μm) and high I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> /I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</sub> ratio (>; 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">6</sup> ). Furthermore, we briefly discuss the implication of these devices in CMOS NAND logic implementation.

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