Abstract
A 90° sector magnetic spectrometer ( δE E ∼ 0.1% ) is utilized for high-resolution Rutherford backscattering spectroscopy (HRBS). The ions scattered from successive atomic layers can be resolved as separated peaks in the energy spectrum at grazing exit angles. It is shown that both high-energy resolution and the grazing angle technique are essential to the monolayer resolution. Results of some applications of HRBS are presented.
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