Monolayer resolution in Rutherford backscattering spectroscopy

Abstract

Conditions for to obtain monolayer resolution in Rutherford backscattering spectroscopy are discussed. It is shown that both high energy resolution and the grazing angle technique are essential to achieve monolayer resolution. A 90° sector magnetic spectrometer ( δE E ∼ 0.1% ) is utilized for high-resolution Rutherford backscattering spectroscopy (HRBS). Energy spectra of scattered 300-keV He ions from single crystals are measured with the spectrometer at grazing exit angles. The ions scattered from successive atomic layers can be resolved as separated peaks in the energy spectra. Results of some applications of HRBS are presented.