Abstract
In this research, Rayleigh surface acoustic wave (SAW) modes of interdigital transducer (IDT)/(100) AlN/(111) diamond were theoretically analyzed and exhibited some excellent acoustic properties. Those Rayleigh SAW modes have smaller film thickness ratios (h/λ), higher phase velocities, and larger electromechanical coupling coefficients (K2) than the ones of IDT/(002) AlN/(111) diamond. Especially for mode 1, the phase velocity is 10 474 m/s, the K2 is 2.31%, and the film thickness ratio (h/λ) is 0.3. The research results exhibit that IDT/(100) AlN/(111) diamond has some excellent properties and provides a predictable and theoretical basis for further application in high velocity SAW devices.
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