Rapid Synthesis of Aluminum Nitride Nanopowders from Gaseous Aluminum Chloride

Abstract

The synthesis of aluminum nitride (AlN) powders is traditionally completed through a thermal nitridation process, in which the reacting aluminum powders are combined with nitrogen at high temperatures with a long reaction time (usually several hours). Moreover, the occurrence of agglomeration within the melting Al particles results in a poor dispersibility of AlN powders, with a low efficiency of nitridation. In this study, an atmosphere-pressure microwave plasma preceded the rapid gas-gas synthesis process. In the reactor, the gaseous aluminum chloride (AlCl3) reactant was fed at different positions (R1, R2, R3) to react with nitrogen at various reaction temperatures (690~1150°C) to rapidly produce AlN nano powders (in several seconds). The process was operated at a total flow rate of 13 slm with NH3 gas content of 0 or 0.77% and an applied power of 1200/1400 W. Results showed that the high purity and dispersibility of AlN powders were found at a AlCl3 feeding position closer to the resonant cavity of the reactor (R3, 1150°C). The AlN particle size was in the range of 25-50 nm. The experiments indicated that the gas-gas reaction for rapidly synthesizing AlN nanopowders can be successfully carried out via an AlCl3-N2 plasma-chemical approach.