Abstract

An efficient grinding wheel has been designed for grinding diamond film which is prepared by chemical vapor deposition. The grinding wheel ((Cu-Sn+Al2O3)+Fe) was prepared by adding iron to metal-based corundum grinding wheel. It had been demonstrated that the grinding wheel exhibited the highest material removal rate compared with metal grinding wheel (e.g. SUS 304 and cast iron) and the material removal rate could reach 5.57–70.32μmh−1 at the grinding speed of 200–500rpm. By means of scanning electron microscope, transmission electron microscope, X-ray diffraction and Raman spectroscopy, the surface morphology of diamond film in different grinding speeds and the grinding mechanism were studied. The results showed that the material removal mechanism was mainly the chemical reaction between diamond and iron and graphitization of diamond with the iron as the catalyst during grinding.

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