Abstract
The surface morphologies of polycrystalline diamond films deposited by the chemical vapor deposition (CVD) technique usually exhibit regular changes with increasing substrate temperature from ball-like amorphous carbon-hydrogen to polycrystalline diamond with predominant facets {100}, followed by {111} facet formation with finally, formation of microcrystalline graphite-rich deposits. We have calculated the temperature dependence of surface energies of the chemical vapor deposited diamond crystals during the preparation process using a model in which a fraction of carbon dangling bonds on the growth surface is saturated by hydrogen. The results can be used to interpret the regular changes of the surface morphologies of CVD diamond films.
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