Abstract
This article gives a new approach for the consideration of the precision reachable by rotating-analyzer ellipsometers. Presented results approve all qualitative conclusions of the previous article on this topic (D. E. Aspnes, Optimizing precision of rotating-analyzer ellipsometers, JOSA, vol.64 (1974), p.639-646), but the general equations and numerical results are different. Additionally this article treats the problem of optimizing the measurements of ellipsometric angles separately. It is shown, measured ψ and A are correlated for such type of ellipsometers. For most real in practice short-noise-limited case a good rule of thumb is proposed, which gives the compromise for suboptimize measurements as p, so ψ and A at the same time. It is proved, as all sources of noise work simultaneously, as well as for null-ellipsometry it is impossible to make measurements at the Brewster angle with rotating-analyzer ellipsometers.
Published Version
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