Abstract
Diamond films produced in the low-pressure flat flame have been examined using Raman spectroscopy. The effect of the oxy-acetylene gas mixture (R=O 2/C 2H 2 gas ratio of 0.95 to 1.06) and substrate temperature (650–850°C) on the form of the non-diamond carbon as well as the diamond phase purity and crystallinity are reported. An assessment of the diamond crystallinity was achieved by inspection of the full-width-at-half-maximum (FWHM) of the Raman line observed at 1332±0.5 cm −1 representing sp 3-bonded carbon. This analysis revealed a FWHM as low as ∼4.3 cm −1 for the optimum growth conditions of an R=1.05 and substrate temperatures of 650–750°C. The broad non-diamond carbon component in the 1350 cm −1 to 1650 cm −1 range was deconvoluted into three distinct Gaussian peaks at 1355±1.5 cm −1, 1470±7.5 cm −1, and 1550±4.0 cm −1. These peaks remained in the same relative proportion regardless of the processing conditions, and the total area of the non-diamond peaks was found to correspond linearly with the background luminescence. A relative comparison of the diamond and non-diamond carbon was used to qualitatively estimate the diamond film phase purity.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
