Abstract
To determine a micro electro mechanical systems (MEMS) inductor configuration that gives large inductance variations and high Q-factors, air-suspended MEMS inductor configurations are studied: (a) an inductor with two angularly meandered lines, (b) a solenoid inductor with a pair of movable shields, (c) a planar spiral inductor with a patterned shield of different areas, and (d) a planar spiral inductor with a metallic frame of different sizes. The configuration of (a) is shown to give a large inductance variation of 115%. However, its Q-factor is only about 10, and difficulties in fabrication are also expected. The configuration of (b) could be a reasonable engineering solution. The inductance variation is 67%, and the maximum Q-factor is over 22. The solenoidal inductor configuration is thus considered suitable for realizing an RF MEMS variable inductor with large inductance variations and high Q-factors.
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