Abstract
We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-/spl mu/m mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: IEEE Transactions on Microwave Theory and Techniques
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
