Abstract
gas atmosphere with different radio-frequency magnetronsputtering power from 80 to 160 W with 20 W step increase. Lipon films deposited at lower sputtering power showed higher ionicconductivities than the films deposited at higher sputtering power. The results of impedance measurements showed that nitrogenincorporation into the glass structure increased the ionic conductivity and this nitrogen content in the Lipon films increased as thesputtering power decreased. In addition, the Auger electron spectroscopy depth profile showed that the increased nitrogen contentin the Lipon films was not the result of the target surface poisoning effect but the result of reactive incorporation of nitrogen.© 2001 The Electrochemical Society. @DOI: 10.1149/1.1420926# All rights reserved.Manuscript submitted May 29, 2001; revised manuscript received September 21, 2001. Available electronically November 8,2001.
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