Abstract
LiPON films were deposited using radio-frequency magnetron sputtering in a pure N 2 gas atmosphere. The influence of rf power, N 2 pressure, target–substrate distance and target density on thin film composition and ionic conductivity has been studied. Impedance measurements performed between 25 and 80 °C have indicated that ionic conductivity increases with nitrogen incorporation into the glass structure. An increase in the deposition rate with the target density has also been observed.
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