Abstract
The Auger electron and Auger electron appearance potential spectra of Ti, TiCx, TiNx and TiO2 were observed quasi-in-stantaneously, and the energy shift values for the L3M2,3M4,5 Auger peak were found to be 1.5 eV, 4.6 eV and 5.3 eV for TiCx, TiNx and TiO2, respectively. These values correspond to the energy separation between band (2eg→2p3/2) and band (2t2g→2p3/2) in XES (X-ray emission spectra) for TiN or the absorption edge in SXAS (soft X-ray absorption spectra) for TiC and TiO2. The threshold values of the L3 AEAP spectra in titanium compounds show good agreement with the energy position of the L3-absorption edge in SXAS. The energy separation between the main peak and the shoulder peak at high energy for TiNx and TiO2 in AEAP spectra corresponds to that of empty states in SXAS.
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