Abstract
In order to attain high diffraction efficiency in high-energy X-ray region, we have developed multilevel-type (6-step) multilayer FZPs with the diameter of 70 μm, which composed of concentric multilayers of alternating high-Z (Cu), low-Z (Al), and four types of composite materials (Cu, Al) layers. Such a multilevel-type FZP with high diffraction efficiency contributes the reduction of the radiation damage to biological specimens, the simplification of the X-ray optical system. Some FZPs are fabricated and their diffraction efficiencies were evaluated at the beamline of SPring-8. For one FZP, the peak efficiency for the 1st-order diffraction of 51% has been obtained at 70 keV. The efficiencies higher than 40% have been achieved in the wide energy range of 70–90 keV. That for the 2nd-order diffraction of 46% has been obtained at 37.5 keV. For another FZP, the peak efficiency for the 1st-order diffraction of 52% has been obtained at 41.3 keV. The efficiencies higher than 45% have been achieved in the wide energy range of 33–49.5 keV.
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