Abstract
The major N Auger transition (KLL) overlapping with the Ti LMM peak and the shape of all Ti Auger lines changing by nitride compound formation are the two main difficulties in the quantitative Auger analysis of titanium nitrides. In this article, a linear least-squares method is used to break down the composition of the 420 eV peak (Ti LMV) into separate components and to determine the nitrogen content of the TiNx films by computer fitting the Ti LMV Auger lines. The results obtained by this method are in good agreement with those determined by x-ray photoelectron spectroscopy. The method is also applied to analyze the depth profile of the film and composition change at the interface to the substrate.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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