Abstract
High spatial resolution Auger electron spectroscopy (AES) and scanning Auger microscopy (SAM) have been developed in a UHV scanning transmission electron microscopy (STEM) instrument. A resolution < 3 nm has been achieved in SAM images. The application of high resolution AES and SAM to the study of supported catalysts has proved very powerful for extracting chemical information of the surface species. In this paper we report further study of supported metal particles by using high resolution AES and SAM. These experiments were conducted in a VG HB-501S UHV STEM codenamed “MIDAS”. Auger electrons were collected from the entrance surface of the sample using a 100 keV probe.
Published Version
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