Abstract
SNMS, a new surface sensitive as well as a bulk analysis technique, has been applied to the quantitative compositional depth profiling analysis of conductive and insulating thin films. Its performance is demonstrated by investigation of YBCO superconductor bulk analysis and sputter deposited layers on single crystalline substrates of SrTiO3 and Al2O3. A stable stoichiometric volume has been observed in bulk material and thin films respectively. Inside a range of ≤ 500 nm from the surface, the composition deviates strongly from the stoichiometric concentration of Y and Ba. Comparative measurements with a freshly cleaved piece of YBCO bulk material which was immediately loaded into the ultrahigh vacuum analysis chamber show constant and stoichiometric concentration of all faced elements (Y, Ba, Cu, O) from the beginning of surface etching. The ratio of Y to Ba and Cu varied by less than 2%, the ratio Cu to oxygen by less than 5% from the nominal composition 1-2-3 (4).
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