Abstract
TiO 2 thin films were deposited on Si(100) and steel substrates by Pyrosol technique. The layer morphology depends on the concentration of titanium tetra-isopropoxide (TTIP) used as molecular precursor in solutions with acetylacetone (Acac). The concentration and, as a result, the viscosity of these TTIP/Acac starting solutions plays an important role on the efficiency of their nebulization and, consequently, on the microstructure and the growth kinetics of the TiO 2 thin films. The correlations between the composition of the TTIP/Acac solutions and the structure, the morphology, optical properties and the deposition rate of the films are presented and discussed. Growth rates as high as 1.8 μm/min are obtained using pure TTIP without Acac solvent. The photocatalytic activity of these Pyrosol TiO 2 thin films grown using TTIP with and without Acac solvent has been investigated and a negative effect of the solvent was found.
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