Abstract
The first pyrolytic laser deposition of boron nitride and molybdenum is reported. The deposition from borazine and molybdenum pentachloride on variety of substrates is demonstrated including graphite, alumina and tungsten. The deposition of boron nitride on graphite produces very short fibers while its deposition on alumina results in uniform shallow dots. Molybdenum layers deposited on graphite at temperatures above 1150 °C are more fibrous and porous whereas films deposited at lower temperatures are flat and flaky. The morphology of each material has also been related to the operating parameters of the gas‐jet LCVD system.
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