Abstract
Pumping mechanisms in sputter ion pumps are quite different for different gasses, and as a consequences pumping speeds are different too. Various parameters, such as magnetic field, electrode voltage, operating pressure, pump history, electrode contamination and partial pressure of other gases are shown to have a major influence on the pumping speed for any given gas. Furthermore these parameters are connected in a way such that the variation of one of them has completely different effects on the pumping speed, depending on the values and the other parameters. The effect of physical paramters and experimental conditions that are sometimes undervalued is analyzed and pointed out. Such a complex dependence of pumping speed can explain the speed of experimental results and their rough agreement with theoretical calculations.
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