Abstract
As a new type of louvre blind cryopump, a parallel-louvre-blind cryopump with a rectangular chamber with opening distance B, louvre width C and depth D, is proposed. The influence of louvre size ratio Rc(=B/C) and pump depth size ratio Rd(=D/B) on the transmission probability Pbc is calculated by the Monte Carlo simulation and measured in model experiments. The following results are obtained. (1) The transmission probability of a cryopump designed with a dimensional ratio of Rd=1.28, is calculated as 0.7 at ratios of RC=0.7∼0.9, which means that this type of cryopump can theoretically atttain a high pumping speed of more than 300 m3·s-1/m2 per opening area. (2) The transmission probability of the cryopump strongly depends on Rd and decreases rapidly for Rd less than 1.0 in the case of Rc=0.92.
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