Abstract
As a new type of actual sized cryopump with high pumping speed, a parallellouvre-blind type cryopump of a rectangular cross section with opening distance B, width C and depth D, is proposed and is produced as a trial pump unit designed to actual size. The influence of pump depth size ratio Rd(=D/B) and number of secondary cryopanels on the transmission probability Pbc of the pump unit is calculated by Monte Carlo simulation and the hydrogen pumping speed is measured by experiments. The following results are obtained: (1) The transmission probability of a cryopump designed with dimensional ratio of Rd=1.3, is calculated to be 0.66 at ratios of Rc(=B/C)=0.88, which means that hydrogen pumping speed of this sized cryopumps can attain 294m3s−1/m2per opening area. (2)The experimental hydrogen pumping speed of the trial pump unit with 29 secondary cryopanels, is measured to be 295m3s−1/m2.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
