Abstract
The two gauge calibrated conductance method has been used extensively to measure pumping speeds of sputter-ion pumps in the pressure range 10 −4 to 10 −8 torr. Results obtained with large variations in the size of pump and measuring equipment are repeatable within 5 per cent and compare with the results obtained from flow measurement methods using a single calibrated gauge. Changes in test gas pressure and composition produce transient effects, and experimental safeguards are described to eliminate incorrect data arising from non-equilibrium conditions. Reference is made to the significance of the discharge intensity I/P as a quantity proportional to pumping speed which enables pumping speed measurements at pressures below 10 −8 torr to be more quickly carried out.
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