Properties of Au, Pt, Pd and Rh levels in silicon measured with a constant capacitance technique

Abstract

Measurements of emission rates and majority carrier capture cross-sections of Au, Pt, Pd and Rh centres in silicon are reported, and the activation energies associated with the different levels of these centres are determined. Where appropriate, our results are compared with values reported in the literature; other results have not been previously reported. The measurement depends on the emission and capture of majority carriers on the centres in the depletion layer of a p- n junction or Schottky barrier. The change in charge state of the centres is monitored by measuring the change in reverse bias applied to the junction necessary to keep the junction capacitance constant. The advantage of this technique, compared with the usual method of keeping the bias voltage constant and measuring the change in capacitance, is demonstrated.