Abstract
Diamond-like carbon films were deposited from methane gas by ion-beam deposition. The hydrogen content and bonding structure of the films were studied as a function of deposition conditions. The hydrogen content was measured by elastic recoil detection analysis and the bonding structures were determined by Fourier transform IR and Raman spectroscopies. The hydrogen content of the carbon films was in the range 15–38 at.% and hydrogen plays an important role in the bonding structure of the films and has a strong effect on mechanical properties of the films. Both hydrogen content and bonding structure depend on the substrate temperature and the bias voltage applied to the substrate. The relation between deposition conditions and the properties of the carbon films was studied.
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