Abstract
Diamond-like carbon films were deposited from methane gas by ion beam deposition. The hydrogen content and bonding structure of the films were studied as a function of deposition conditions. The hydrogen concentration was measured by elastic recoil detection analysis with a 50 MeV Ar ion beam and the bonding structure determined by IR and Raman spectroscopy. The hydrogen content of the carbon films is 20–30 at%. The hydrogen plays an important role in forming the bonding structure of the films and affects the mechanical properties of the films. Both hydrogen content and bonding structure are shown to depend on the substrate temperature and the bias voltage applied to the substrate.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
