Abstract

To further increase recording density of disk storage drives, thermally-assisted magnetic recording can solve the fundamental issues of thermal fluctuation and is regarded as the key technology for achieving recording density of more than 1 Tb/in^2. In this technology, it is suggested that there is critical issues for the ultra-thin liquid lubricant films and diamond-like carbon (DLC) films on the disk surfaces, because they are heated to high temperature with laser beams. In this study, we focused on the thermal stability of the three types of DLC films deposited by chemical vapor deposition (CVD), ion beam deposition (IBD) and filtered cathodic vacuum arc (FCVA) deposition. We also compared the optical properties of heated three DLC films characterized by ellipsometry, electron spectroscopy for chemical analysis and raman spectroscopy. As a result, the effects of heating temperature on the structure of DLC films were clarified.

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